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RESTRICTED STOCK UNITS AGREEMENT

Shareholder Agreement

RESTRICTED STOCK UNITS AGREEMENT | Document Parties: MATTSON TECHNOLOGY INC You are currently viewing:
This Shareholder Agreement involves

MATTSON TECHNOLOGY INC

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Title: RESTRICTED STOCK UNITS AGREEMENT
Governing Law: California     Date: 8/1/2008
Industry: Semiconductors     Sector: Technology

RESTRICTED STOCK UNITS AGREEMENT, Parties: mattson technology inc
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EXHIBIT 10.1

RESTRICTED STOCK UNITS AGREEMENT

                This Restricted Stock Units Agreement (the " Agreement ") is made and entered into on ____________ (the " Date of Grant "), pursuant to the Mattson Technology, Inc. 2005 Equity Incentive Plan, as amended (the " Plan "). The Committee administering the Plan has selected the party specified on the execution page hereof (the " Participant ") to receive the following award (the " Award ") of Restricted Stock Units, each of which represents the right to receive on the applicable Settlement Date one (1) share of the Common Stock (" Stock ") of Mattson Technology, Inc., a Delaware corporation (the " Company "), on the terms and conditions set forth below to which Participant accepts and agrees:

1.             Award Granted.

Date of Grant

_____________________________

No. of Restricted Stock Units

_____________________________

Vesting Commencement Date

_____________________________

Settlement Date

For each Restricted Stock Unit, except as otherwise provided by this Agreement, the date on which such unit becomes a Vested Unit in accordance with Section 4 or Section 8 below.

2.             Grant of Units. On the Date of Grant, the Participant shall acquire, subject to the provisions of this Agreement, the Number of Restricted Stock Units, as specified in Section 1 above (the " Units "). Each Unit represents a right to receive on a date determined in accordance with this Agreement one (1) share of Stock. This Award shall be governed by the terms of the Plan, which are incorporated herein by this reference. The Participant acknowledges having received and read a copy of the Plan. Capitalized terms not otherwise defined by this Agreement will have the meanings assigned in the Plan.

3.             No Monetary Payment Required. The Participant is not required to make any monetary payment (other than applicable tax withholding, if any) as a condition to receiving the Units or shares of Stock issued upon settlement of the Units, the consideration for which shall be past services actually rendered and/or future services to be rendered to a Participating Company or for its benefit. Notwithstanding the foregoing, if required by applicable state corporate law, the Participant shall furnish consideration in the form of cash or past services rendered to or for the benefit of a Participating Company having a value not less than the par value of the shares of Stock issued upon settlement of the Units.

4.             Vesting of Units. Subject to Participant's continued Service through the applicable vesting date, the Units will vest and become " Vested Units " in accordance with the following schedule:

                25% of the Units will vest forty-five (45) calendar days after the end of a fiscal quarter in which fiscal year-to- date net sales exceed ------------; and

                25% of the Units will vest forty-five (45) calendar days after the end of a fiscal quarter in which fiscal year-to-date net sales exceed ----------; and

                25% of the Units will vest forty-five (45) calendar days after the end of a fiscal quarter in which fiscal year-to-date net sales exceed ------------; and

                25% of the Units will vest forty-five (45) calendar days after the end of a fiscal quarter in which fiscal year-to-date net sales exceed ------------; million;

                provided, however, that no Units shall vest unless the (a) the operating profit margin (i.e. income from operations, divided by net sales) for such fiscal year (through the end of such quarter) equals or exceeds ------ percent, and (b) the average closing Stock price for such quarter equals or exceeds -------dollars .

                If the Participant's Service terminates because of the death or Disability of the Participant, a percentage of the Units that otherwise would not be vested as of the date of Service termination (the "Nonvested Units") shall vest. Such percentage shall be the percentage of Nonvested Units that, on the date of Service termination, would have


been vested had such Nonvested Units been subject to a straight-line, monthly vesting schedule beginning January 1, 2008 and ending December 31, 2011.

5.             Company Reacquisition Right. In the event that the Participant's Service terminates for any reason (other than death or Disability) or no reason, with or without cause, the Participant shall forfeit and the Company shall automatically reacquire all Units which are not, as of the time of such termination, Vested Units, and the Participant shall not be entitled to any payment therefor.

6.             Settlement of the Award.

(a)           Issuance of Shares of Stock. Subject to the provisions of Section 6(c) below, the Company shall issue to the Participant on the Settlement Date with respect to each Vested Unit to be settled on such date one (1) share of Stock. Shares of Stock issued in settlement of Units shall not be subject to any restriction on transfer other than any such restriction as may be required pursuant to Section 6(c), Section 7 or the Company's Insider Trading Policy. For purposes of this Section, " Insider Trading Policy " means the written policy of the Company pertaining to the sale, transfer or other disposition of the Company's equity securities by members of the Board, officers or other employees who may possess material, non-public information regarding the Company, as in effect at the time of a disposition of any Shares.

(b)           Beneficial Ownership of Shares; Certificate Registration . The Participant hereby authorizes the Company, in its sole discretion, to deposit for the benefit of the Participant with any broker with which the Participant has an account relationship of which the Company has notice any or all shares acquired by the Participant pursuant to the settlement of the Award. Except as provided by the preceding sentence, a certificate for the shares as to which the Award is settled shall be registered in the name of the Participant, or, if applicable, in the names of the heirs of the Participant.

(c)           Restrictions on Grant of the Award and Issuance of Shares . The grant of the Award and issuance of shares of Stock upon settlement of the Award shall be subject to compliance with all applicable requirements of federal, state or foreign law with respect to such securities. No shares of Stock may be issued hereunder if the issuance of such shares would constitute a violation of any applicable federal, state or foreign securities laws or other law or regulations or the requirements of any stock exchange or market system upon which the Stock may then be listed. If the Company is unable to obtain authority from any applicable regulatory body deemed by the Company's legal counsel to be necessary for the lawful issuance of any shares subject to the Award, the Company shall be relieved of any liability in relation to its inability to issue such shares. As a condition to the settlement of the Award, the Company may require the Participant to satisfy any qualifications that may be necessary or appropriate, to evidence compliance with any applicable law or regulation and to make any representation or warranty with respect thereto as may be requested by the Company.

(d)           Fractional Shares . The Company shall not be required to issue fractional shares upon the settlement of the Award.

7.             Tax Matters.

(a)           Tax Withholding in General. At the time this Agreement is executed, or at any time thereafter as requested by the Company, the Participant hereby authorizes withholding from payroll and any other amounts payable to the Participant, and otherwise agrees to make adequate provision for, any sums required to satisfy the federal, state, local and foreign tax withholding obligations of the Company, if any, which arise in connection with the Award or the issuance of shares of Stock in settlement thereof. The Company shall have no obligation to deliver shares of Stock until the tax withholding obligations of the Company have been satisfied by the Participant.

(b)           Assignment of Sale Proceeds; Payment of Tax Withholding by Check. Subject to compliance with applicable law and the Company's Insider Trading Policy, the Participant shall satisfy the Company's tax withholding obligations in accordance with procedures established by the Company providing for delivery by the Participant to the Company or a broker approved by the Company of properly executed instructions, in a form approved by the Company, providing for the assignment to the Company of the proceeds of a sale with respect to some or all of the shares being acquired upon settlement of Units. Notwithstanding the

2


foregoing, the Participant may elect to pay by check the amount of the Company's tax withholding obligations arising on any Settlement Date by delivering written notice of such election to the Company on a form specified by the Compa


 
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