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SEPARATION AND GENERAL RELEASE AGREEMENT

Release Agreement

SEPARATION AND GENERAL RELEASE AGREEMENT | Document Parties: ULTRATECH INC | Rick Friedman You are currently viewing:
This Release Agreement involves

ULTRATECH INC | Rick Friedman

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Title: SEPARATION AND GENERAL RELEASE AGREEMENT
Governing Law: California     Date: 1/19/2007
Industry: Semiconductors     Sector: Technology

SEPARATION AND GENERAL RELEASE AGREEMENT, Parties: ultratech inc , rick friedman
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                                                                    Exhibit 10.2

                    SEPARATION AND GENERAL RELEASE AGREEMENT
                    ----------------------------------------

          This Separation and General Release Agreement (this "Agreement") is
entered into by and between Rick Friedman ("Executive") and Ultratech, Inc., a
Delaware corporation (the "Company") on January 14, 2007.

                                   WITNESSETH:

          WHEREAS, the Executive is currently employed by the Company pursuant
to an Employment Agreement, dated February 3, 2006, as amended as of January 14,
2007 (the "Employment Agreement"); and

          WHEREAS, Executive has resigned, effective December 14, 2006, from his
position as Vice President, World-wide Sales and Customer Service, and,
effective January 14, 2007, from employment with the Company;

          WHEREAS, the Company and Executive agree that, subject to Executive
entering into this Agreement, Executive shall be entitled to receive the
severance benefits provided for under Section 6.2 of the Employment Agreement;

          WHEREAS, any capitalized terms that are not defined herein shall have
the meaning set forth in the Employment Agreement.

          NOW, THEREFORE, in consideration of the mutual promises and covenants
  contained herein, the Company and the Executive agree as follows:

1.    Effective   Date:   This Agreement   shall become   effective on the eighth day
     after Executive   delivers to the Company a   fully-executed   version of this
     Agreement without modification or revocation (the "Effective Date").

2.    Resignation   from   Employment:   The parties have agreed that   Executive has
     resigned from   employment   with the Company and any of its   subsidiaries or
     affiliates,   effective January 14, 2007 (the "Resignation Date"). Executive
     further acknowledges that, as of December 14, 2006, Executive was no longer
     the Company's Senior Vice President, World-wide Sales and Customer Service,
      and was no longer   an   executive   officer   of the   Company,   and that as of
     January 14, 2007, Executive shall no longer be an employee of the Company.

3.    No Right of   Reinstatement:   Executive will have no right to   reinstatement
     with the Company or any of its subsidiaries.

4.    Exclusive   Severance   Benefits:   Except for the severance benefits to which
     Executive is entitled to receive   pursuant to the express   terms of Section
     6.2 of the   Employment   Agreement   (the   "Severance   Benefits"),   Executive
     acknowledges that he will not receive,   and is not entitled to receive, any
     additional compensation, severance, vesting, equity, or other benefits from
     the Company or any of its   subsidiaries or affiliates after the Resignation
     Date.   Executive further   acknowledges that he has been paid for all wages,
     salary,   and other   compensation   earned during his employment   through the

                                       1
<PAGE>

     Resignation Date, except for the following: (a) Executive's base salary for
     the period of December 16 through the Resignation Date, which shall be paid
     on January   12,   2006;   (b)   payment   for   Executive's   accrued   but unused
     vacation as of the   Resignation   Date (which,   as of January 14, 2006, will
     amount to 4.62 days of vacation),   which shall be paid on January 12, 2007;
     and (c) payment of Executive's   unpaid   business   expenses,   which shall be
     submitted to the Company no later than the Resignation Date and which shall
     be   reimbursed   by the   Company in   accordance   with its   standard   expense
     reimbursement policy.

5.    No Admission of Liability Or Wrongdoing: This Agreement does not constitute
     an admission by the Company or Executive of any violation of federal, state
     or local law,   ordinance or regulation or of any violation of the Company's
     policies   or   procedures   or of any   liability   or   wrongdoing   whatsoever.
     Neither this Agreement nor anything in this Agreement shall be construed to
     be or shall be   admissible   in any   proceeding   as evidence of liability or
     wrongdoing by the Company or Executive.   This   Agreement may be introduced,
     however,   in any   proceeding to enforce the   Agreement.   Such   introduction
     shall be pursuant to an order protecting its   confidentiality to the extent
     permitted by law.

6.    Releases:   Except for those   obligations   created by or arising out of this
     Agreement,   the Employment Agreement, the stock option agreements governing
     Executive's    stock   option    grants    listed   below   (the   "Stock    Option
     Agreements"),   the RSU Agreement (as defined   below),   any   indemnification
     agreement    between   the   Company   and   Executive    (the    "Indemnification
     Agreement"),   and any   proprietary   information   and   inventions   agreement
     and/or    confidentiality    agreement   between   the   Company   and   Executive
     (collectively,   the   "Confidentiality   Agreement"),   Executive,   on his own
     behalf   and on behalf of his   descendants,   dependents,   heirs,   executors,
     administrators,   assigns and successors, and each of them, hereby covenants
     not to sue and fully   releases and   discharges   the Company and each of its
     and   their    subsidiaries,    parent,    or    affiliated    partnerships    and
     corporations, past and present, as well as each of its and their directors,
     officers,   trustees,   shareholders,    members,   partners,   representatives,
     attorneys,   assignees,   successors, agents and employees, past and present,
     and each of them (individually and collectively, "Company Releasees"), from
     and with   respect to any and all claims,   wages,   agreements,   obligations,
     demands and causes of action,   known or unknown,   suspected or   unsuspected
     (collectively,   "Claims"),   arising   out of or in any   way   connected   with
     Executive's   employment   and   termination   of employment   with the Company,
     Executive's   consulting    relationship   with   the   Company   prior   to   such
     employment,   if   any,   or   any   other   relationship   with,   interest   in or
     termination of relationship with any Company   Releasees,   including without
     limiting the   generality of the foregoing,   any claim for wages,   overtime,
     salary, severance pay, compensation, commissions, bonus or similar benefit,
     car allowance,   sick leave,   pension,   retirement,   vacation pay, paid time
     off,   life   insurance,   health or medical   insurance,   or any other   fringe
      benefit,   or   disability,   or any Claim   pursuant to any federal,   state or
     local law,   statute or cause of action   including,   but not limited to: the
     federal Civil Rights Act of 1964, as amended;   the federal   Americans   with
     Disabilities Act of 1990; the federal Age   Discrimination in Employment Act
     of 1967,   as amended (the   "ADEA");   the   California   Fair   Employment   and
     Housing Act, as amended;   the California   Family Rights Act; the California
     Labor Code;   the   Sarbanes-Oxley   Act;   tort law;   contract   law;   wrongful

                                       2
<PAGE>

     discharge;   discrimination;   retaliation;   harassment;   fraud;   defamation;
     emotional   distress;   breach of the implied covenant of good faith and fair
     dealing;   or breach of any contract.   Notwithstanding any provision of this
     Section   6, the   foregoing   release   shall   not   apply to any right you may
     otherwise have to (i) vested   benefits,   if any, under the Company's 401(k)
     plan and deferred compensation plans, in accordance with the terms of those
     plans,   life   insurance   conversion   rights,    unemployment    compensation,
     workers' compensation or disability   insurance,   or to (ii) indemnification
     by the Company   pursuant to the   Company's   certificate   of   incorporation,
     by-laws, insurance policies, Section 14 of the Employment Agreement, and/or
     applicable law.

7.    Section 1542 Waiver:   In executing this Agreement,   and except as expressly
     stated in this   Agreement,   Executive   intends for it to be   effective as a
     general   release   to each and   every   claim,   demand   and   cause of   action
     hereinabove specified.   In furtherance of this intention,   Executive hereby
     expressly   waives any rights and benefits   conferred by SECTION 1542 OF THE
     CALIFORNIA CIVIL CODE, and expressly   consents that this Agreement shall be
     given full force and effect   according to each and all of its express terms
     and provisions,   including those related to unknown and unsuspected claims,
     demands   and causes of action,   if any,   as well as those   relating   to any
     other claims, demands and causes of action hereinabove   specified.   SECTION
     1542 provides:

                      "A GENERAL RELEASE DOES NOT EXTEND TO
                    CLAIMS WHICH THE CREDITOR DOES NOT KNOW
                    OR SUSPECT TO EXIST IN HIS FAVOR AT THE
                    TIME OF EXECUTING THE RELEASE, WHICH IF
                             KNOWN BY HIM MUST HAVE
                            MATERIALLY AFFECTED HIS
                          SETTLEMENT WITH THE DEBTOR."

Executive   acknowledges   that he may   hereafter   discover   claims   or   facts   in
addition   to or   different   from   those   which they now know or believe to exist
against   Company   Releasees with respect to the subject matter of this Agreement
and which,   if known or suspected at the time of executing this   Agreement,   may
have materially   affected this   settlement.   Nevertheless,   Executive waives any
right,   claim or cause of action that might arise as a result of such   different
or additiona


 
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