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SEPARATION AND GENERAL RELEASE AGREEMENT

Release Agreement

SEPARATION AND GENERAL RELEASE AGREEMENT | Document Parties: ULTRATECH INC | John E. Denzel You are currently viewing:
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ULTRATECH INC | John E. Denzel

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Title: SEPARATION AND GENERAL RELEASE AGREEMENT
Governing Law: California     Date: 11/8/2006
Industry: Semiconductors     Law Firm: O'Melveny & Myers LLP    

SEPARATION AND GENERAL RELEASE AGREEMENT, Parties: ultratech inc , john e. denzel
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                                                                    Exhibit 10.2

                    SEPARATION AND GENERAL RELEASE AGREEMENT
                    ----------------------------------------

       This Separation and General Release Agreement (this "Agreement") is
entered into by and between John E. Denzel ("Executive" ) and Ultratech, Inc., a
Delaware corporation (the "Company" ).

                              W I T N E S S E T H:
                              --------------------

       WHEREAS, the Executive is currently employed by the Company pursuant to
an Amended and Restated Employment Agreement, dated November 2, 2006 (the
"Employment Agreement"); and

       WHEREAS, on October 5, 2006, Executive resigned from his position as
President and Chief Operating Officer;

       WHEREAS, the Company and Executive agree that, subject to Executive
entering into this Agreement, Executive is entitled to receive the severance
benefits provided for under Section 6.2 of the Employment Agreement;
         
       WHEREAS, any capitalized terms that are not defined herein shall have the
meaning set forth in the Employment Agreement.

       NOW, THEREFORE, in consideration of the mutual promises and covenants
contained herein, the Company and the Executive agree as follows:

       1. Effective Date: This Agreement shall become effective on the eighth
day after Executive delivers to the Company a fully-executed version of this
Agreement without modification or revocation (the "Effective Date").

        2. Resignation from Employment: The parties have agreed that Executive
shall retire from employment with the Company and any of its subsidiaries or
affiliates, effective November 4, 2006 (the "Resignation Date"). Executive
further acknowledges that, as of October 5, 2006, Executive ceased holding the
title of, and ceased performing services as, the Company's President and Chief
Operating Officer and ceased to be an executive officer of the Company.

       3. No Right of Reinstatement: Executive will have no right to
reinstatement with the Company or any of its subsidiaries.

       4. No Other Compensation or Benefits: Except as expressly set forth in
the Employment Agreement, Executive acknowledges that he will not receive, and
is not entitled to receive, any additional compensation, severance or benefits
after the Resignation Date.

       5. No Admission of Liability Or Wrongdoing: This Agreement does not
constitute an admission by the Company or Executive of any violation of federal,
state or local law, ordinance or regulation or of any violation of the Company's
policies or procedures or of any liability or wrongdoing whatsoever. Neither
this Agreement nor anything in this Agreement shall be construed to be or shall
be admissible in any proceeding as evidence of liability or wrongdoing by the
Company or Executive. This Agreement may be introduced, however, in any
proceeding to enforce the Agreement. Such introduction shall be pursuant to an
order protecting its confidentiality to the extent permitted by law.



                                       1
<PAGE>

       6. Releases: Except for those obligations created by or arising out of
this Agreement, the Employment Agreement, the stock option agreements governing
Executive's stock option grants listed below (the "Stock Option Agreements"),
any indemnification agreement between the Company and Executive (the
"Indemnification Agreement"), and any proprietary information and inventions
agreement and/or confidentiality agreement between the Company and Executive
(collectively, the "Confidentiality Agreement"), Executive, on his own behalf
and on behalf of his descendants, dependents, heirs, executors, administrators,
assigns and successors, and each of them, hereby covenants not to sue and fully
releases and discharges the Company and each of its and their subsidiaries,
parent, or affiliated partnerships and corporations, past and present, as well
as each of its and their directors, officers, trustees, shareholders, members,
partners, representatives, attorneys, assignees, successors, agents and
employees, past and present, and each of them (individually and collectively,
"Company Releasees"), from and with respect to any and all claims, wages,
agreements, obligations, demands and causes of action, known or unknown,
suspected or unsuspected (collectively, "Claims"), arising out of or in any way
connected with Executive's employment and termination of employment with the
Company, Executive's consulting relationship with the Company prior to such
employment, if any, or any other relationship with, interest in or termination
of relationship with any Company Releasees, including without limiting the
generality of the foregoing, any claim for wages, overtime, salary, severance
pay, compensation, commissions, bonus or similar benefit, car allowance, sick
leave, pension, retirement, vacation pay, paid time off, life insurance, health
or medical insurance, or any other fringe benefit, or disability, or any Claim
pursuant to any federal, state or local law, statute or cause of action
including, but not limited to: the federal Civil Rights Act of 1964, as amended;
the federal Americans with Disabilities Act of 1990; the federal Age
Discrimination in Employment Act of 1967, as amended (the "ADEA"); the
California Fair Employment and Housing Act, as amended; the California Family
Rights Act; the California Labor Code; the Sarbanes-Oxley Act; tort law;
contract law; wrongful discharge; discrimination; retaliation; harassment;
fraud; defamation; emotional distress; breach of the implied covenant of good
faith and fair dealing; or breach of any contract. Notwithstanding any provision
of this Section 8, the foregoing release shall not apply to any right you may
otherwise have to (i) vested benefits, if any, under the Company's 401(k) plan
and deferred compensation plans, in accordance with the terms of those plans,
life insurance conversion rights, unemployment compensation, workers'
compensation or disability insurance, or to (ii) indemnification by the Company
pursuant to the Company's certificate of incorporation, by-laws, insurance
policies, Section 13 of the Employment Agreement, and/or applicable law.

       7. Section 1542 Waiver: In executing this Agreement, and except as
expressly stated in this Agreement, Executive intends for it to be effective as
a general release to each and every claim, demand and cause of action
hereinabove specified. In furtherance of this intention, Executive hereby
expressly waives any rights and benefits conferred by SECTION 1542 OF THE
CALIFORNIA CIVIL CODE, and expressly consents that this Agreement shall be given
full force and effect according to each and all of its express terms and
provisions, including those related to unknown and unsuspected claims, demands
and causes of action, if any, as well as those relating to any other claims,
demands and causes of action hereinabove specified. SECTION 1542 provides:


                                       2
<PAGE>

                     "A GENERAL RELEASE DOES NOT EXTEND TO CLAIMS WHICH THE
                      CREDITOR DOES NOT KNOW OR SUSPECT TO EXIST IN HIS FAVOR AT
                     THE TIME OF EXECUTING THE RELEASE, WHICH IF KNOWN BY HIM
                     MUST HAVE MATERIALLY AFFECTED HIS SETTLEMENT WITH THE
                     DEBTOR."

Executive acknowledges that he may hereafter discover claims or facts in
addition to or different from those which they now know or believe to exist
against Company Releasees with respect to the subject matter of this Agreement
and which, if known or suspected at the time of executing this Agreement, may
have materially affected this settlement. Nevertheless, Executive waives any
right, claim or cause of action that might arise as a result of such different
or additional claims or facts. Executive acknowledges that he understands the
significance and consequence of such release and such specific waiver of SECTION
1542.

       8. Waiver Of Age Discrimination Claims: Executive expressly acknowledges
and agrees that, by entering into this Agreement, he is waiving any and all
rights or claims that he may have arising under the Age Discrimination in
Employment Act of 1967, as amended, which have arisen on or before the date of
execution of this Agreement.


 
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