Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 1, 2009

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Exhibit 10.9

Axcelis Technologies, Inc.
Named Executive Officer Base Compensation at March 1, 2009

        This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the "Company") and each of:

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the Company's principal executive officer (Mary G. Puma),

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the Company's principal financial officer (Stephen G. Bassett), and

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the three most highly compensated other executive officers serving as executive officers at December 31, 2008.

        These executive officers are referred to herein as "named executive officers" or "NEOs."

        Other than in the case of Mary G. Puma, the Company has not entered into any written agreements with its named executive officers addressing the amount of base salary due to the executive. The Company's Amended and Restated Employment Agreement with Ms. Puma is listed as Exhibit 10.11 to this Form 10-K (incorporated by reference to Exhibit 10.3 to the Company's Form 10-Q for the quarter ended