AMENDMENT TO ARTICLE 7. WARRANTY OF EXCLUSIVE DISTRIBUTION AGREEMENT FSI INTERNATIONAL, INC.

Exhibit 10.36

AMENDMENT
TO
ARTICLE 7. WARRANTY OF EXCLUSIVE DISTRIBUTION AGREEMENT
BETWEEN
FSI INTERNATIONAL, INC.
And
mFSI
Effective 16 April 1999

System Orders Placed After 16 April, 1999 and Before 25 April, 2003

     Warranty period is 2 years from customer acceptance but not to exceed 2 years +12 weeks form the date of shipment from mFSI to the end user.

System Orders Placed After April 24, 2003

     Warranty period is 15 months from the date of shipment from FSI, provided, however, that in the case that there is a localization effort in Japan and that it is so indicated on the purchase order, an additional 2 months period will be added to such 15 months; namely the warranty period would be 17 months.

     If shipment or customer acceptance is delayed due to FSI quality problem, hardware problem, software problem, process problem, etc. and provided that an RFA is submitted to