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JOINT DEVELOPMENT AGREEMENT

Development Agreement

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TRIKON TECHNOLOGIES INC | AVIZA TECHNOLOGY, INC

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Title: JOINT DEVELOPMENT AGREEMENT
Governing Law: California     Date: 6/1/2005
Industry: ELECTR     Sector: TECHNO

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Joint Development Agreement dated March 14, 2005

Exhibit 10.1

 

EXECUTION COPY – 3/14/05

 

JOINT DEVELOPMENT AGREEMENT

 

by and between

 

TRIKON TECHNOLOGIES, INC.

 

and

 

AVIZA TECHNOLOGY, INC.

 

dated

 

March 14, 2005


EXECUTION COPY – 3/14/05

 

TABLE OF CONTENTS

 

 

 

 

 

 

ARTICLE I Definitions and Construction

  

1

 

 

 

            1.1

 

    Definitions

  

1

            1.2

 

    Construction

  

4

 

 

ARTICLE II Development

  

4

 

 

 

            2.1

 

    General

  

4

            2.2

 

    Delivery of Existing Manufacturing Documentation and Software Source Code

  

4

            2.3

 

    Requirements

  

4

            2.4

 

    First Payment Milestones – Delivery of Trikon Transport Module and the Existing Manufacturing Documentation

    and Source Code

  

5

            2.5

 

    Delivery of Documented Transport Module Software

  

5

            2.6

 

    Second Payment Milestone – Delivery of Developed Software

  

5

            2.7

 

    Third Payment Milestone – Acceptance of Software

  

6

            2.8

 

    Milestone Dependencies

  

6

 

 

ARTICLE III Project Management

  

7

 

 

 

            3.1

 

    Project Managers

  

7

            3.2

 

    Responsibilities

  

7

            3.3

 

    Appointment

  

7

            3.4

 

    Replacement

  

7

            3.5

 

    Facilities

  

7

            3.6

 

    Development Access

  

7

 

 

ARTICLE IV Post-Development Supply and License

  

8

 

 

 

            4.1

 

    Supply Commitment

  

8

            4.2

 

    Price

  

8

            4.3

 

    Limitation

  

8

            4.4

 

    Manufacturing Documentation and Software Updates

  

8

 

 

ARTICLE V Fees and Payment

  

9

 

 

 

            5.1

 

    Development Fee

  

9

            5.2

 

    License Fee

  

9

            5.3

 

    Royalties

  

9

            5.4

 

    Taxes

  

9

            5.5

 

    Payment Method

  

10

 

 

ARTICLE VI IP Rights and Ownership

  

10

 

 

 

            6.1

 

    General IP Ownership

  

10

 

 

ARTICLE VII IP and Software Licenses

  

10

 

 

 

            7.1

 

    General

  

10

 

-i-


 

 

 

 

 

            7.2

 

    Granted By Trikon

  

10

            7.3

 

    Delivery

  

11

 

 

ARTICLE VIII Confidentiality

  

11

 

 

 

            8.1

 

    Confidential Information

  

11

            8.2

 

    Confidential Information Exclusions

  

11

            8.3

 

    Mandatory Disclosures

  

11

            8.4

 

    Confidentiality Obligation

  

11

            8.5

 

    Confidentiality of Agreement

  

12

 

 

ARTICLE IX Representations and Warranties

  

12

 

 

 

            9.1

 

    Mutual Representations and Warranties

  

12

            9.2

 

    Trikon Representations and Warranties.

  

12

            9.3

 

    Existing Manufacturing Documentation and Software

  

13

            9.4

 

    Disclaimer

  

13

 

 

ARTICLE X Indemnity

  

13

 

 

 

            10.1

 

    Indemnification by Trikon

  

13

            10.2

 

    Remedies

  

13

            10.3

 

    Limitations

  

14

 

 

ARTICLE XI Limitation of Liability

  

14

 

 

 

            11.1

 

    CONSEQUENTIAL DAMAGES

  

14

            11.2

 

    LIMITATION OF LIABILITY

  

14

 

 

ARTICLE XII Governing Law

  

14

 

 

 

            12.1

 

    Governing Law

  

14

 

 

ARTICLE XIII Term and Termination

  

15

 

 

 

            13.1

 

    Term of Agreement

  

15

            13.2

 

    Termination by Aviza

  

15

            13.3

 

    Termination for Cause

  

15

            13.4

 

    Effect of Termination

  

15

 

 

ARTICLE XIV Miscellaneous

  

15

 

 

 

            14.1

 

    Force Majeure

  

15

            14.2

 

    Import and Export

  

15

            14.3

 

    Relationship of Parties

  

15

            14.4

 

    No Third Party Beneficiaries

  

16

            14.5

 

    Notices

  

16

            14.6

 

    Assignment

  

16

            14.7

 

    Waiver and Modification

  

16

            14.8

 

    Severability

  

16

            14.9

 

    Trademarks

  

16

            14.10

 

    Freedom of Action

  

16

            14.11

 

    Entire Agreement

  

17

            14.12

 

    Counterparts

  

17

 

 


EXECUTION COPY – 3/14/05

 

TABLE OF EXHIBITS

 

 

 

 

EXHIBIT A

  

Development Plan

EXHIBIT A-1

  

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