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Axcelis Technologies

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1) AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Shareholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016

2) AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN

3) CHANGE OF CONTROL AGREEMENT

4) AXCELIS TECHNOLOGIES, INC. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate Employee Grant Form

5) RESTRICTED STOCK UNIT AWARD AGREEMENT

6) AXCELIS TECHNOLOGIES, INC. 2012 Equity Incentive Plan Non-Qualified Stock Option Certificate Non-Employee Director Grant Form

7) SECOND AMENDED AND RESTATED LOAN AND SECURITY AGREEMENT

8) Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 14, 2011

9) EXECUTIVE RETIREMENT AGREEMENT

10) Axcelis Technologies, Inc. Named Executive Officer Base Compensation

11) AXCELIS TECHNOLOGIES, INC. Axcelis Management Incentive Plan

12) Re: Modification of Compensation of Chief Executive Officer and Chairman

13) LICENSE AGREEMENT

14) Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 1, 2009

15) Re: 41/4% Convertible Senior Subordinated Notes Due 2009 (the "Notes")

16) SHARE PURCHASE AGREEMENT

17) LOAN AND SECURITY AGREEMENT

18) AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT

19) CHANGE OF CONTROL AGREEMENT

20) Axcelis Technologies, Inc. Named Executive Officer Base Compensation

21) AMENDED AND RESTATED EMPLOYMENT AGREEMENT

22) Axcelis Technologies, Inc. Non-Employee Director Cash Compensation

23) Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 1, 2007

24) Axcelis Technologies, Inc. Executive Officer Cash Compensation at March 1, 2006

25) Axcelis Technologies, Inc. Director Compensation at March 1, 2006

26) EMPLOYEE STOCK PURCHASE PLAN

27) LETTER AGREEMENT

28) CHANGE OF CONTROL AGREEMENT

29) AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT

30) Axcelis Technologies,nbsp;Inc. Non-Employee Director Compensation effective Julynbsp;1, 2005

31) RESTRICTED STOCK UNIT AWARD AGREEMENT

32) AXCELIS TECHNOLOGIES, INC.2000 STOCK PLAN

33) AXCELIS TECHNOLOGIES, INC., RESTRICTED STOCK AGREEMENT

34) EMPLOYEE STOCK PURCHASE PLAN

35) EXHIBIT 10.15 AXCELIS TECHNOLOGIES, INC. DIRECTOR COMPENSATION AT MARCH 1, 2005

36) EXHIBIT 10.14 AXCELIS TECHNOLOGIES, INC. EXECUTIVE OFFICER CASH COMPENSATION AT MARCH 1, 2005

37) EXHIBIT 10.13 AXCELIS TECHNOLOGIES, INC. EMPLOYEE STOCK PURCHASE PLAN

38) CHANGE OF CONTROL AGREEMENT

39) EXECUTIVE SEPARATION AGREEMENT

40) AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION AGREEMENT


42) AXCELIS TECHNOLOGIES, INC. EXECUTIVE OFFICER AGREEMENT

43) 2000 STOCK PLAN